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Ultra Low K Dielectrics For Damascene Copper Interconnect Schemes

Acronym: ULISSE
Start: 9/1/2001
End: 8/31/2003
Homepage: http://cordis.europa.eu/data/PROJ_FP5/ACTIONeqDndSESSIONeq112422005919ndDOCeq2366ndTBLeqEN_PROJ.htm

Project Status History
completed9/1/2001
 
Abstract
This project is focussed on the most critical aspects of the back end interconnection field for 100 nm CMOS technology: ultra low k (k

 
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