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ULISSE - Ultra Low K Dielectrics For Damascene Copper Interconnect Schemes
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Ultra Low K Dielectrics For Damascene Copper Interconnect Schemes
Acronym:
ULISSE
Start:
9/1/2001
End:
8/31/2003
Homepage:
http://cordis.europa.eu/data/PROJ_FP5/ACTIONeqDndSESSIONeq112422005919ndDOCeq2366ndTBLeqEN_PROJ.htm
Project Status History
completed
9/1/2001
Abstract
This project is focussed on the most critical aspects of the back end interconnection field for 100 nm CMOS technology: ultra low k (k
Organisations
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CEA-LETI-DTS
St Microelectronics Sa
Technische Universitaet Chemnitz
Commissariat a l'Energie Atomique
INTERUNIVERSITAIR MICRO-ELECTRONICA CENTRUM VZW
Philips Industrial Telecommunication Systems
INFINEON TECHNOLOGIES AG
Bull Sa
1
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ARNAUD Lucile
1
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